{"created":"2023-06-20T15:40:16.855113+00:00","id":374,"links":{},"metadata":{"_buckets":{"deposit":"0789c3f9-5901-4f29-94b4-3a84af9a9741"},"_deposit":{"created_by":17,"id":"374","owners":[17],"pid":{"revision_id":0,"type":"depid","value":"374"},"status":"published"},"_oai":{"id":"oai:nagano-nct.repo.nii.ac.jp:00000374","sets":["3:35"]},"author_link":["859","862","861","860","863"],"item_2_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1996-12-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"62","bibliographicPageStart":"53","bibliographicVolumeNumber":"30","bibliographic_titles":[{"bibliographic_title":"長野工業高等専門学校紀要"}]}]},"item_2_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application","subitem_description_type":"Other"}]},"item_2_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Authors prepared 8mol%Y_2O_3-ZrO_2 (8Y-ZrO_2) and 3mol%Y_2O_3-ZrO_2 (3Y-ZrO_2) ceramic films by the magnetron-assisted rf sputtering method on the glass substrate. The prperties of hardness, the internal stress and the refractive index etc. were investigated for the prepared films. The hardnesses of 8Y-ZrO_2 and 3Y-ZrO_2 films were 15.6 GPa and 12.9 GPa, respectively. The total compressive stresses for 8Y-ZrO_2 and 3Y-ZrO_2 films at 1μm thick on the borosilicate glass substrates were 1280 Nm^-1 and 1100 Nm^-1, and the internal stresses for both films at 0.1μm thick were 3.13 GPa and 2.94 GPa, respectively. The fracture toughnesses for the coated substrate with 8Y-ZrO_2 and 3Y-ZrO_2 films were 0.719 MNm^-3/2 and 1.11 MNm^-3/2, respectively.","subitem_description_type":"Abstract"}]},"item_2_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"長野工業高等専門学校"}]},"item_2_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00179170","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0286-1909","subitem_source_identifier_type":"ISSN"}]},"item_2_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"MORIYAMA, Minoru"}],"nameIdentifiers":[{"nameIdentifier":"859","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"KAMATA, Kiichiro"}],"nameIdentifiers":[{"nameIdentifier":"860","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"SAITO, Hidetoshi"}],"nameIdentifiers":[{"nameIdentifier":"861","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"NISHINO, Osamu"}],"nameIdentifiers":[{"nameIdentifier":"862","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"KAWAGUCHI, Yoshimori"}],"nameIdentifiers":[{"nameIdentifier":"863","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2013-02-19"}],"displaytype":"detail","filename":"nagano_nct-30-07.pdf","filesize":[{"value":"478.0 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"nagano_nct-30-07.pdf","url":"https://nagano-nct.repo.nii.ac.jp/record/374/files/nagano_nct-30-07.pdf"},"version_id":"6bfc9ead-2433-4f7c-bbed-0f0eedcaf061"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering","subitem_title_language":"en"}]},"item_type_id":"2","owner":"17","path":["35"],"pubdate":{"attribute_name":"公開日","attribute_value":"2013-02-19"},"publish_date":"2013-02-19","publish_status":"0","recid":"374","relation_version_is_last":true,"title":["Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering"],"weko_creator_id":"17","weko_shared_id":-1},"updated":"2023-06-20T16:09:38.963351+00:00"}