@article{oai:nagano-nct.repo.nii.ac.jp:00000477,
 author = {森山, 実 and 鎌田, 喜一郎},
 journal = {長野工業高等専門学校紀要},
 month = {Dec},
 note = {application, One of the methods most frequently used for strengthening ceramics or glass materials (substrates) is to introduce compressive stresses at the surface. We prepared amorphous SiN_xC_y (Si_3N_4-SiC, SiN_x SiC_y) films at a low temperature of 400℃ by the plasma CVD method for application to protecting coating materials. The prepared films showed a strong compressive stress at the vicinity of SiC composition. As an application of the study on the internal stress of these films, we examined the flexural strength of crown glass substrates coated with the films. SiC film (5μm thick) has been observed to increase greatly the flexural strength of the glass substrate (1.2mm thick) to twice that operating by compressive internal stress in itself.},
 pages = {31--37},
 title = {セラミックスコーティングによる基体の強化},
 volume = {22},
 year = {1990}
}