@article{oai:nagano-nct.repo.nii.ac.jp:00000590,
 author = {松島, 久夫},
 journal = {長野工業高等専門学校紀要},
 month = {Dec},
 note = {application},
 pages = {55--61},
 title = {プラズマCVDによるカーボン膜の生成},
 volume = {14},
 year = {1983}
}