@article{oai:nagano-nct.repo.nii.ac.jp:00000649,
 author = {松島, 久夫},
 journal = {長野工業高等専門学校紀要},
 month = {Dec},
 note = {application, Pt is a valuable material for thermal sensors, because of its excellent thermal stability and linearity of resistance-temperature. This paper describes the electrical properties of Pt thin films prepared by th sputtering method. The experimental results are summarized as follows. The thickness of Pt thin films is about 500 〓～1000〓 depending on the strength of the ionic current. Their resistance-temperature chracteristic shows a remarkable hysteresis phenomenon. Their crystallization depends on the temperature of heat treatment.},
 pages = {37--43},
 title = {スパッタリング法によるPt抵抗薄膜の作成},
 volume = {19},
 year = {1988}
}