{"created":"2023-06-20T15:40:31.234555+00:00","id":649,"links":{},"metadata":{"_buckets":{"deposit":"5bd42d58-8da5-4c68-8303-e00fd32b6d9c"},"_deposit":{"created_by":17,"id":"649","owners":[17],"pid":{"revision_id":0,"type":"depid","value":"649"},"status":"published"},"_oai":{"id":"oai:nagano-nct.repo.nii.ac.jp:00000649","sets":["3:41"]},"author_link":["1378"],"item_2_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Platinum (Pt) Resistance Thin Films Produced by Sputtering Method"}]},"item_2_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1988-12-28","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"43","bibliographicPageStart":"37","bibliographicVolumeNumber":"19","bibliographic_titles":[{"bibliographic_title":"長野工業高等専門学校紀要"}]}]},"item_2_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application","subitem_description_type":"Other"}]},"item_2_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Pt is a valuable material for thermal sensors, because of its excellent thermal stability and linearity of resistance-temperature. This paper describes the electrical properties of Pt thin films prepared by th sputtering method. The experimental results are summarized as follows. The thickness of Pt thin films is about 500 〓～1000〓 depending on the strength of the ionic current. Their resistance-temperature chracteristic shows a remarkable hysteresis phenomenon. Their crystallization depends on the temperature of heat treatment.","subitem_description_type":"Abstract"}]},"item_2_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"長野工業高等專門学校"}]},"item_2_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00179170","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0286-1909","subitem_source_identifier_type":"ISSN"}]},"item_2_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"松島, 久夫"}],"nameIdentifiers":[{"nameIdentifier":"1378","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2013-02-21"}],"displaytype":"detail","filename":"nagano_nct-19-05.pdf","filesize":[{"value":"641.4 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"nagano_nct-19-05.pdf","url":"https://nagano-nct.repo.nii.ac.jp/record/649/files/nagano_nct-19-05.pdf"},"version_id":"64aa5fcf-55b0-49ff-99f1-dd152689b233"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"スパッタリング法によるPt抵抗薄膜の作成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"スパッタリング法によるPt抵抗薄膜の作成"}]},"item_type_id":"2","owner":"17","path":["41"],"pubdate":{"attribute_name":"公開日","attribute_value":"2013-02-21"},"publish_date":"2013-02-21","publish_status":"0","recid":"649","relation_version_is_last":true,"title":["スパッタリング法によるPt抵抗薄膜の作成"],"weko_creator_id":"17","weko_shared_id":-1},"updated":"2023-06-20T15:59:18.481454+00:00"}