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Preparation of crystalline carbon films by Photo-CVD
https://nagano-nct.repo.nii.ac.jp/records/499
https://nagano-nct.repo.nii.ac.jp/records/499f2ff49b4-920c-4ff6-b9dd-f28114a9d0a0
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
nagano_nct-20-09.pdf (546.7 kB)
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| Item type | Departmental Bulletin Paper(1) | |||||
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| 公開日 | 2013-02-19 | |||||
| タイトル | ||||||
| タイトル | Preparation of crystalline carbon films by Photo-CVD | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
MATSUSHIMA, Hisao
× MATSUSHIMA, Hisao |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Polycrystalline carbon films were prepared by photo-decomposition of acetylene under irradiation of UV light from the low pressure Hg lamp. The samples were characterized by electoron beam diffraction and scanning electoron mycroscope (SEM). The substrate temperature above 300℃ were necessary for obtaining polycrystalline carbon films. Recently, a great deal of attention has been forced on diamond or hard carbon films. These films have been obtained by thermal chemical vapour deposition (thermal CVD), plasma-enhanced chemical vapour deposition (Plasma CVD). Few papers have been described about carbon films deposited by photo-assisted method. In those studies, carbon films had amorphous structure. In this paper, polycrystalline carbon films were prepare by direct photo-decomposition of acetylene. | |||||
| 書誌情報 |
長野工業高等専門学校紀要 巻 20, p. 69-71, 発行日 1989-12-28 |
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| 出版者 | ||||||
| 出版者 | 長野工業高等専門学校 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0286-1909 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00179170 | |||||
| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
