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アイテム
Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering
https://nagano-nct.repo.nii.ac.jp/records/374
https://nagano-nct.repo.nii.ac.jp/records/374cf93f82e-744d-45fb-8e48-bd24331acfe2
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
nagano_nct-30-07.pdf (478.0 kB)
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| アイテムタイプ | Departmental Bulletin Paper(1) | |||||
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| 公開日 | 2013-02-19 | |||||
| タイトル | ||||||
| タイトル | Mechanical properties of 3Y-ZrO_2 and 8Y-ZrO_2 films by rf sputtering | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
MORIYAMA, Minoru
× MORIYAMA, Minoru× KAMATA, Kiichiro× SAITO, Hidetoshi× NISHINO, Osamu× KAWAGUCHI, Yoshimori |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Authors prepared 8mol%Y_2O_3-ZrO_2 (8Y-ZrO_2) and 3mol%Y_2O_3-ZrO_2 (3Y-ZrO_2) ceramic films by the magnetron-assisted rf sputtering method on the glass substrate. The prperties of hardness, the internal stress and the refractive index etc. were investigated for the prepared films. The hardnesses of 8Y-ZrO_2 and 3Y-ZrO_2 films were 15.6 GPa and 12.9 GPa, respectively. The total compressive stresses for 8Y-ZrO_2 and 3Y-ZrO_2 films at 1μm thick on the borosilicate glass substrates were 1280 Nm^-1 and 1100 Nm^-1, and the internal stresses for both films at 0.1μm thick were 3.13 GPa and 2.94 GPa, respectively. The fracture toughnesses for the coated substrate with 8Y-ZrO_2 and 3Y-ZrO_2 films were 0.719 MNm^-3/2 and 1.11 MNm^-3/2, respectively. | |||||
| 書誌情報 |
長野工業高等専門学校紀要 巻 30, p. 53-62, 発行日 1996-12-27 |
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| 出版者 | ||||||
| 出版者 | 長野工業高等専門学校 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0286-1909 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00179170 | |||||
| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
