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{"_buckets": {"deposit": "5bd42d58-8da5-4c68-8303-e00fd32b6d9c"}, "_deposit": {"created_by": 17, "id": "649", "owners": [17], "pid": {"revision_id": 0, "type": "depid", "value": "649"}, "status": "published"}, "_oai": {"id": "oai:nagano-nct.repo.nii.ac.jp:00000649", "sets": ["41"]}, "author_link": ["1378"], "item_2_alternative_title_1": {"attribute_name": "その他(別言語等)のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "Platinum (Pt) Resistance Thin Films Produced by Sputtering Method"}]}, "item_2_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1988-12-28", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "43", "bibliographicPageStart": "37", "bibliographicVolumeNumber": "19", "bibliographic_titles": [{"bibliographic_title": "長野工業高等専門学校紀要"}]}]}, "item_2_description_19": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_description": "application", "subitem_description_type": "Other"}]}, "item_2_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Pt is a valuable material for thermal sensors, because of its excellent thermal stability and linearity of resistance-temperature. This paper describes the electrical properties of Pt thin films prepared by th sputtering method. The experimental results are summarized as follows. The thickness of Pt thin films is about 500 〓~1000〓 depending on the strength of the ionic current. Their resistance-temperature chracteristic shows a remarkable hysteresis phenomenon. Their crystallization depends on the temperature of heat treatment.", "subitem_description_type": "Abstract"}]}, "item_2_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "長野工業高等專門学校"}]}, "item_2_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00179170", "subitem_source_identifier_type": "NCID"}]}, "item_2_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0286-1909", "subitem_source_identifier_type": "ISSN"}]}, "item_2_version_type_20": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "松島, 久夫"}], "nameIdentifiers": [{"nameIdentifier": "1378", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2013-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "nagano_nct-19-05.pdf", "filesize": [{"value": "641.4 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_11", "mimetype": "application/pdf", "size": 641400.0, "url": {"label": "nagano_nct-19-05.pdf", "url": "https://nagano-nct.repo.nii.ac.jp/record/649/files/nagano_nct-19-05.pdf"}, "version_id": "64aa5fcf-55b0-49ff-99f1-dd152689b233"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "スパッタリング法によるPt抵抗薄膜の作成", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "スパッタリング法によるPt抵抗薄膜の作成"}]}, "item_type_id": "2", "owner": "17", "path": ["41"], "permalink_uri": "https://nagano-nct.repo.nii.ac.jp/records/649", "pubdate": {"attribute_name": "公開日", "attribute_value": "2013-02-21"}, "publish_date": "2013-02-21", "publish_status": "0", "recid": "649", "relation": {}, "relation_version_is_last": true, "title": ["スパッタリング法によるPt抵抗薄膜の作成"], "weko_shared_id": -1}
スパッタリング法によるPt抵抗薄膜の作成
https://nagano-nct.repo.nii.ac.jp/records/649
https://nagano-nct.repo.nii.ac.jp/records/64983dd9424-10be-4c39-bdb9-fcb7bd3ad36b
名前 / ファイル | ライセンス | アクション |
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nagano_nct-19-05.pdf (641.4 kB)
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Item type | Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-21 | |||||
タイトル | ||||||
タイトル | スパッタリング法によるPt抵抗薄膜の作成 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Platinum (Pt) Resistance Thin Films Produced by Sputtering Method | |||||
著者 |
松島, 久夫
× 松島, 久夫 |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Pt is a valuable material for thermal sensors, because of its excellent thermal stability and linearity of resistance-temperature. This paper describes the electrical properties of Pt thin films prepared by th sputtering method. The experimental results are summarized as follows. The thickness of Pt thin films is about 500 〓~1000〓 depending on the strength of the ionic current. Their resistance-temperature chracteristic shows a remarkable hysteresis phenomenon. Their crystallization depends on the temperature of heat treatment. | |||||
書誌情報 |
長野工業高等専門学校紀要 巻 19, p. 37-43, 発行日 1988-12-28 |
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出版者 | ||||||
出版者 | 長野工業高等專門学校 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0286-1909 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00179170 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |