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CVD法を用いた絶縁性セラミックス膜の合成と特性評価
https://nagano-nct.repo.nii.ac.jp/records/830
https://nagano-nct.repo.nii.ac.jp/records/830b721f7d1-401a-4524-910b-27887ed5ac2c
名前 / ファイル | ライセンス | アクション |
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47_1-4 (733.2 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-07-10 | |||||
タイトル | ||||||
タイトル | CVD法を用いた絶縁性セラミックス膜の合成と特性評価 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 熱CVD | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | アルミナ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 薄膜 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | アルミニウムイソプロポキシド | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Fabrication and Evaluation for Insulated Ceramic Film using Thermal CVD | |||||
著者 |
森山, 実
× 森山, 実 |
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著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 1687 | |||||
姓名 | MORIYAMA, Minoru | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Alumina film was deposited on several metallic and ceramic substrates by thermal decomposition of metal-organic compound (aluminum-isopropoxide) using thermal CVD to get a insulated ceramic film. The film was characterized by a electric conductivity, morphology observation using scanning electron microscope (SEM), diffraction pattern of X-ray and film thickness. | |||||
書誌情報 |
長野工業高等専門学校紀要 en : Memoirs of Nagano National College of Technology 巻 47, p. 1-4, 発行日 2013-06-30 |
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出版者 | ||||||
出版者 | 長野工業高等専門学校 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0286-1909 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA1259397X | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
見出し | ||||||
大見出し | 学術論文 | |||||
言語 | ja |